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Nova NanoSEM 450 from FEI

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The Nova NanoSEM 450 is a modern field-emission scanning electron microscope with 1 nm ultimate resolution, large sample chamber with advanced motorized stage, and navigation supported by an in-chamber camera. High- and low-vacuum operations are possible. Several detectors are available to observe secondary and backscattered electrons under various conditions and also to obtain STEM images. Beam deceleration allows beam-landing energies from 20 eV to 30 keV. The system also includes EDS and EBSD capability (Oxford Aztec.) The purchase of the system was funded by NSF MRI grant number DMR_1337727.

SPECS

  • 200 V-30 kV accelerating voltage, 0-4 stage bias
  • 1 nm ultimate resolution
  • 110 x 100 mm, 5-axis, motorized, eucentric stage
  • Navigation supported by an in-chamber camera
  • High and low vacuum (< 200 Pa of water vapor) operation
  • Various detectors:
    • Everhard-Thornley secondary electron detector
    • Segmented back-scattered electron detector
    • Through-the-lens detector
    • Low vacuum and gaseous analytical detector
    • Solid state STEM detector
  • Oxford Aztec energy dispersive X-ray analysis and EBSD system
  • Integrated plasma cleaner